AutoWafer Pro™: Ultrasonic Equipment for NDT of Bonded Wafers

 

SONIX AutoWafer Pro™ 是专为全自动晶圆检测设计的机型，主要应用在Bond wafer，MEMS 内部空洞、离层检测，TSV量测方面。

 

 

● 使用于200和300mm晶圆

● 符合一级净化间标准

● Cassette装载，全自动检测，支持FOUP或FOSB机械臂
● 支持200mm & 300mm SECS/GEM协议
● KLARF输出文件


AutoWafer pro is our most advanced ultrasonic equipment for detecting defects in bonded wafers in a production environment, providing fast, high-resolution scanning of 200mm and 300mm bonded wafers.

Product Details: 

A flexible, automated wafer inspection system designed for production, AutoWafer Pro provides fast, high-resolution scanning of 200mm and 300mm bonded wafers. It’s the ideal ultrasonic equipment for identifying bond defects in wafer applications such as MEMS, BSI Sensors, CMOS, memory, TSV and LED.

With extensive analysis capabilities at both the wafer and device level, there’s no need to reload and rescan wafers to get all the diagnostic images you need. And with high-speed scanning managed by fully automated wafer handling, AutoWafer Pro supports nondestructive testing (NDT) for improved yields and a faster time to market.

• The ideal ultrasonic equipment for detecting wafer-to-wafer bonding defects
• A fully automated, production-ready wafer inspection system for MEMS, CMOS, BSI sensors, memory, TSV, LED and other applications employing wafers 200mm and smaller
• Provides wafer map with die-level pass/fail indicators (optional)
• Provides analysis (optional)
• 200mm SECS/GEM
• TSV entrenched metrology
• Fast, high-resolution scanning of 200mm and 300mm wafers for production environments
• Fully automated robotics using open cassettes, SMIF Pod, FOUPs or FOSB handling
• Class 1 clean room compliant, with integrated HEPA filter
• 300mm SECS/GEM (optional)
• KLARF compatible (optional)

似空科学仪器（上海）有限公司是一家仪器设备的方案提供商，我们致力于为中国制造业和研发机构提供高性能、符合人体工学设计的仪器设备及解决方案。我们为客户提供的仪器进口贸易服务，同时可以根据客户的设备应用场景、生产和研发规划，为客户的仪器选型提供的咨询。似空科学的技术团队也可以为客户提供激光加工、电子控制、系统软件或者特定失效分析仪器的定制开发。仪器设备发展的限是探测手段和传感器不对被测目标产生任何干扰，企业管理的某种境界是一切以市场为**，不以自我的意愿抗拒市场的趋势，代替客户的喜好，于是我们取名“似空”，希望以忘我的精神服务客户。我们梦想有朝一日，能够充分掌握市场需求，深刻理解仪器设备的技术原理，聚集一批有、有理想、有技术的人，为中国的制造业升级以及中国科研走向世界水平，提供自有知识产权的仪器设备！